
UHV FIB-SEM NanoSpace
For ultimate performances
at Ultra-High Vacuum
NanoSpace is a conveniently versatile system specially designed to operate under Ultra-High Vacuum (UHV) conditions. NanoSpace can be configured either as a Scanning Electron Microscope (SEM) or as a dual beam platform combining a SEM and a high performance Focused Ion Beam (FIB). This UHV instrument is developed with a modular architecture allowing a large choice of SEM and FIB columns that matches end-users specific needs and goals. NanoSpace offers the best, complete and customized solution for FIB nanomachining, surface analysis, on samples demanding the most rigorous contamination-free environment.
NanoSpace can also be equipped with a UHV compatible Gas Injection System (GIS) for local metal deposition and selective etching.
In-situ connection to third party systems such as MBE clusters, surface analysis instrument, is also possible through a UHV intermediate chamber. This connectivity broadens NanoSpace application scope.
Vacuum Performances |
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Main Chamber Vacuum |
5.10-10 mbar |
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UHV Configuration |
Maximum instrument bakeout |
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Sample Main Chamber Introduction |
30 min |
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Full UHV design - Contamination free |
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Fully customizable system |
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Designed to perform high quality surface analysis Excellent conditions and unique dual beam geometry allow correlation of in-situ SEM and high quality Secondary Ion Mass Spectrometry images in a single instrument |
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High resolution imaging NanoSpace can integrate either an electrostatic SEM or a magnetic SEM which both produce high quality images |
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Accurate sample control The UHV compatible 6-axis stage allows to load samples with dimensions less or equal to 100 mm in length and width |
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Fully automated instrument The NanoSpace control and imaging software is highly ergonomic and easy to use. Vacuum system is fully automated to ensure safe, fast and easy vacuum operations |
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UHV connection A UHV intermediate chamber is designed to ensure the instrument complete connection with UHV third party systems, process cluster or synchrotron beam line |

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Inside NanoSpace UHV chamber