Application Note


FIB

June 2016
Diamond / plasma FIB (i-FIB) / Ion implantation / Nitrogen-Vacancy (NV) center
Diamond / plasma FIB (i-FIB) / Ion implantation / Nitrogen-Vacancy (NV) center
June 2016

Maskless and targeted creation of arrays of color centers in diamond with i-FIB

June 2016
Andromede / LMAIS FIB / Nano particles / clusters / surface interaction / mass spectrometry
Andromede / LMAIS FIB / Nano particles / clusters / surface interaction / mass spectrometry
June 2016

Cobra ExB in the Andromede Project: A rising generation of NAno Particle Ion Source (NAPIS) column

May 2016
Nanopatterning / LMAIS FIB / Wien filter / Nanostructures / Milling / Reproducibility
Nanopatterning / LMAIS FIB / Wien filter / Nanostructures / Milling / Reproducibility
May 2016

Ultimate nanopatterning of Si substrate with Cobra ExB mass-filtered FIB column

SEM

May 2016
SEM / SPM / STM / In-situ / UHV / Probe positioning / Nanowires / Resistivity measurements
SEM / SPM / STM / In-situ / UHV / Probe positioning / Nanowires / Resistivity measurements
May 2016

In-situ Scanning Electron Microscope (SEM) supplements Scanning Probe Microscopy (SPM) for accurate probe positioning and electrical measurements

Gas Injection Systems

June 2016
Delayering / GIS / Plasma FIB / large cross sections / failure analysis
Delayering / GIS / Plasma FIB / large cross sections / failure analysis
June 2016

Xe plasma FIB (i-FIB) Delayering technology using water as Gas-Assisting Etching (GAE) enhancer

May 2016
TEM lamella / GIS / polishing / Rocking stage / curtaining
TEM lamella / GIS / polishing / Rocking stage / curtaining
May 2016

Curtaining-Free Top-Down TEM Lamella Preparation from a Cutting Edge Integrated Circuit using a Rocking-Stage and water as Gas-Assisting Etching (GAE) enhancer

Standalone Systems

October 2023
Ni-Based superalloys / SIMS / Ga FIB (Cobra) / Chemical analysis
Ni-Based superalloys / SIMS / Ga FIB (Cobra) / Chemical analysis
October 2023

Chemical Nano-Characterization by Correlative Analyzes in Electron Microscopy and Secondary Ions Mass Spectroscopy: Example on Ni-Based Superalloys