MonoGIS
Single Gas Injection System
For FIB and SEM
Single line Gas Injection System, MonoGIS can be combined to FIB or SEM to fabricate 3-D nanostructures or to locally etch the sample.
Orsay Physics MonoGIS has one single axis motion, and two positions (stand-by and working positions). In stand-by mode, the nozzle is parked 25 mm far from the sample.
The working position can be reached thanks to a pneumatic actuator within 1 second, and with a reproducibility better than 10μm. Orsay Physics MonoGIS is compatible with most of the commercial SEMs and FIBs. It is also possible to connect an external gas source on the system.
Two MonoGIS versions are available:
- heating version for low vapour pressure precursors
- cooling version for high pressure precursors
