GIS-5

A gas injection module is an instrument which is used in combination with a focussed ion beam (FIB) or focussed electron beam (FEB) to extend its capabilities. The combination of the gas injection module and the FIB/FEB is sometimes named 'chemical vapor deposition' (CVD) because it allows both the deposition of finely shaped metallic and insulating microstructures or a locally enhanced / selective etching of various materials.

The Orsay GIS-5 is equipped with 5 different precursors and capillaries.
Each line has its own needle. A 3-motorized axis stage allows to accurately position the needle in the working area.