UHV compatible single line Gas Injection System, MonoGIS can be combined to FIB or SEM to fabricate 3-D nanostructures or to locally etch the sample.
Orsay Physics MonoGIS has one single axis motion, and two positions (stand-by and working positions). In stand-by mode, the nozzle is parked 25 mm far from the sample.
The working position can be reached thanks to a pneumatic actuator within 1 second, and with a reproducibility better than 10μm. Orsay Physics MonoGIS is compatible with any UHV chamber, since it can fitted through a 35 CF flange.
It is also possible to connect an external gas source on the system.
Two MonoGIS versions are available:
- heating version for low vapour pressure precursors
- cooling version for high pressure precursors