ExB FIB

In order to get an alternative solution to Ga LMIS, Orsay Physics has developed mass-filtered columns.

The ExB FIB is based on a Wien filter technology, and includes the powerful COBRA-FIB optics. The standard sources are AuSi or AuGe although we can also offer sources based on Si, Cr, Fe, Co, Ni, Ge, In, Sn, Au, Mn, Pb, etc... both for milling and local implantation.
Orsay Physics also offers a fully UHV version of the mass-filtered FIB.